SELF-INDUCED SURFACE TEXTURING OF Al 2...

International Journal of High Speed Electronics and Systems 2007 / 03 Vol. 17; Iss. 1

SELF-INDUCED SURFACE TEXTURING OF Al 2 O 3 BY MEANS OF INDUCTIVELY COUPLED PLASMA REACTIVE ION ETCHING IN CL 2 CHEMISTRY

BATONI, PAOLO, STOKES, EDWARD B., SHAH, TRUSHANT K., HODGE, MICHAEL D., SULESKI, THOMAS J.
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Volume:
17
Language:
english
Journal:
International Journal of High Speed Electronics and Systems
DOI:
10.1142/S0129156407004205
Date:
March, 2007
File:
PDF, 616 KB
english, 2007
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