[ECS 214th ECS Meeting - Honolulu, HI (October 12 - October...

  • Main
  • [ECS 214th ECS Meeting - Honolulu, HI...

[ECS 214th ECS Meeting - Honolulu, HI (October 12 - October 17, 2008)] ECS Transactions - Si/SiGe Epitaxy and Selective Etch Applications for Advanced Thin-Films MOSFET Structures

Loubet, Nicolas, Boeuf, Frédéric, Monfray, Stéphane, Fenouillet-Beranger, Claire, Denorme, Stéphane, Bidal, Grégory, Skotnicki, Thomas, Dutartre, Didier
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
16
Year:
2008
Language:
english
DOI:
10.1149/1.2986750
File:
PDF, 2.48 MB
english, 2008
Conversion to is in progress
Conversion to is failed