Fixed Abrasive Diamond Wire Saw Slicing of Single-Crystal...

Materials and Manufacturing Processes 2004 / 12 Vol. 19; Iss. 2

Fixed Abrasive Diamond Wire Saw Slicing of Single-Crystal Silicon Carbide Wafers

Hardin, Craig W., Qu, Jun, Shih, Albert J.
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Volume:
19
Language:
english
Journal:
Materials and Manufacturing Processes
DOI:
10.1081/amp-120029960
Date:
December, 2004
File:
PDF, 1.19 MB
english, 2004
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