Modeling of Defects Generation in 300 mm Silicon...

Japanese Journal of Applied Physics 2010 / 12 Vol. 49; Iss. 12

Modeling of Defects Generation in 300 mm Silicon Monocrystals during Czochralski Growth

Lee, Sang Hun, Song, Do Won, Oh, Hyun Jung, Kim, Do Hyun
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Volume:
49
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.49.121303
Date:
December, 2010
File:
PDF, 940 KB
english, 2010
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