A one-dimensional piezoelectric-driven inertial...

Measurement Science and Technology 1993 / 04 Vol. 4; Iss. 4

A one-dimensional piezoelectric-driven inertial micropositioner with vertical capabilities

Woodburn, C N, McKinnon, A W, Roberts, D A, Taylor, M E, Welland, M E
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Volume:
4
Language:
english
Journal:
Measurement Science and Technology
DOI:
10.1088/0957-0233/4/4/016
Date:
April, 1993
File:
PDF, 211 KB
english, 1993
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