Passivation of nanostructured silicon optical devices by thermal carbonization
V. Torres-Costa, J. Salonen, V.-P. Lehto, R.J. Martín-Palma, J.M. Martínez-DuartVolume:
111
Year:
2008
Language:
english
Pages:
3
DOI:
10.1016/j.micromeso.2007.07.027
File:
PDF, 204 KB
english, 2008