Localization and physical analysis of dielectric weaknesses for state-of-the-art deep trench based DRAM products
G. Neumann, J. Touzel, R. DuschlVolume:
45
Year:
2005
Language:
english
Pages:
6
DOI:
10.1016/j.microrel.2005.07.056
File:
PDF, 5.49 MB
english, 2005