The need for multi-scale approaches in Cu/low-k reliability issues
Cadmus A. Yuan, Olaf van der Sluis, Willem D. van Driel, G.Q. (Kouchi) ZhangVolume:
48
Year:
2008
Language:
english
Pages:
10
DOI:
10.1016/j.microrel.2008.03.024
File:
PDF, 5.39 MB
english, 2008