Dielectric thinning model applied to metal insulator metal...

Microelectronics Reliability 2009 Vol. 49; Iss. 12

Dielectric thinning model applied to metal insulator metal capacitors with Al2O3 dielectric

K.H. Allers, J. Böck, S. Boguth, K. Goller, H. Knapp, R. Lachner
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Volume:
49
Year:
2009
Language:
english
Pages:
9
DOI:
10.1016/j.microrel.2009.07.027
File:
PDF, 1.30 MB
english, 2009
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