Detailed investigation of the effects of La and Al content on the electrical characteristics and reliability properties of La–Al–O gate dielectrics
Masamichi Suzuki, Masato Koyama, Atsuhiro KinoshitaVolume:
50
Year:
2010
Language:
english
Pages:
4
DOI:
10.1016/j.microrel.2010.06.009
File:
PDF, 527 KB
english, 2010