Detailed investigation of the effects of La and Al content...

Detailed investigation of the effects of La and Al content on the electrical characteristics and reliability properties of La–Al–O gate dielectrics

Masamichi Suzuki, Masato Koyama, Atsuhiro Kinoshita
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Volume:
50
Year:
2010
Language:
english
Pages:
4
DOI:
10.1016/j.microrel.2010.06.009
File:
PDF, 527 KB
english, 2010
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