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[IEEE 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Estoril, Portugal (2015.1.18-2015.1.22)] 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Hard mask free DRIE of crystalline Si nanobarrel with 6.7nm wall thickness and 50∶1 aspect ratio
Liu, Peng, Yang, Fang, Wang, Wei, Wang, Wei, Luo, Kui, Wang, Ying, Zhang, DachengYear:
2015
Language:
english
DOI:
10.1109/MEMSYS.2015.7050890
File:
PDF, 3.26 MB
english, 2015