[IEEE 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Estoril, Portugal (2015.1.18-2015.1.22)] 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Microfabricated electrostatic planar lens array and extractors for multi-focused ion beam system using ionic liquid ion source emitter array

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