High-temperature oxidation of ion-plated TiN and TiAlN films
Ichimura, Hiroshi, Kawana, AtsuoVolume:
8
Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/jmr.1993.1093
Date:
May, 1993
File:
PDF, 1.01 MB
english, 1993