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ECS Transactions [ECS 218th ECS Meeting - Las Vegas, NV (October 10 - October 15, 2010)] - (Invited) Chemisorption Reaction Mechanisms for Atomic Layer Deposition of High-k Oxides on High Mobility Channels
Delabie, A., Sioncke, Sonja, Van Elshocht, S., Caymax, Matty, Pourtois, Geoffrey, Pierloot, KristineYear:
2010
Language:
english
DOI:
10.1149/1.3485270
File:
PDF, 588 KB
english, 2010