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Comparative Study of Solid-Phase Crystallization of Amorphous Silicon Deposited by Hot-wire CVD, Plasma-Enhanced CVD, and Electron-Beam Evaporation
Stradins, Paul, Kunz, Oliver, Young, David L., Yan, Yanfa, Jones, Kim M., Xu, Yueqin, Reedy, Robert C., Branz, Howard M., Aberle, Armin G., Wang, QiVolume:
989
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-0989-a16-04
Date:
January, 2007
File:
PDF, 354 KB
english, 2007