Comparative Study of Solid-Phase Crystallization of...

Comparative Study of Solid-Phase Crystallization of Amorphous Silicon Deposited by Hot-wire CVD, Plasma-Enhanced CVD, and Electron-Beam Evaporation

Stradins, Paul, Kunz, Oliver, Young, David L., Yan, Yanfa, Jones, Kim M., Xu, Yueqin, Reedy, Robert C., Branz, Howard M., Aberle, Armin G., Wang, Qi
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
989
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-0989-a16-04
Date:
January, 2007
File:
PDF, 354 KB
english, 2007
Conversion to is in progress
Conversion to is failed