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[IEEE 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Estoril, Portugal (2015.1.18-2015.1.22)] 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Hollow MEMS mass sensors for real-time particles weighing and sizing from a few 10 nm to the μm scale
Hadji, Celine, Berthet, Clement, Baleras, Francois, Cochet, Martine, Icard, Beatrice, Agache, VincentYear:
2015
Language:
english
DOI:
10.1109/memsys.2015.7050916
File:
PDF, 1.36 MB
english, 2015