WSiN Cap Layer for Improvement of Ohmic Contact Morphology in AlGaN/GaN High Electron Mobility Transistors
Lu, Chung Yu, Hilt, Oliver, Lossy, Richard, Chaturvedi, Nidhi, John, Wilfred, Chang, Edward Yi, Würfl, Joachim, Tränkle, GüntherVolume:
48
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.48.111003
Date:
November, 2009
File:
PDF, 217 KB
english, 2009