Strain Relaxed SiGe Buffer Prepared by Means of Thermally...

Electrochemical and Solid-State Letters 2005 Vol. 8; Iss. 11

Strain Relaxed SiGe Buffer Prepared by Means of Thermally Driven Relaxation and CMP

Kim, Sang-Hoon, Song, Young-Joo, Bae, Hyun-Chul, Lee, Sang-Heung, Kang, Jin-Young, Kim, Bo-Woo
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Volume:
8
Year:
2005
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.2050567
File:
PDF, 505 KB
english, 2005
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