Formation of silica coating films from spin-on polysilazane...

Formation of silica coating films from spin-on polysilazane at room temperature and their stability in hot water

Kubo, Tomoko, Tadaoka, Eisuke, Kozuka, Hiromitsu
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Volume:
19
Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/jmr.2004.19.2.635
Date:
February, 2004
File:
PDF, 639 KB
english, 2004
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