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[ECS 216th ECS Meeting - Vienna, Austria (October 4 - October 9, 2009)] ECS Transactions - Fabrication of Micro- and Nano-electrodes by Selective Chemical Vapor Deposition of Cu on Si Substrates Patterned with AZ5214{trade mark, serif} and PMMA
Papadimitropoulos, Giorgos, Cibella, Sara, Leoni, Roberto, Arapoyianni, Aggeliki, Davazoglou, DimitrisYear:
2009
Language:
english
DOI:
10.1149/1.3207734
File:
PDF, 1001 KB
english, 2009