Optimisation of Junctions formed by Solid Phase Epitaxial...

MRS Proceedings 2002 / 1 Vol. 717

Optimisation of Junctions formed by Solid Phase Epitaxial Regrowth for sub-70nm CMOS

Lindsay, Richard, Pawlak, Bartlomiej J., Stolk, Peter, Maex, Karen
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Volume:
717
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-717-c2.1
Date:
January, 2002
File:
PDF, 437 KB
english, 2002
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