Electrical Properties of TaOx Thin Films for ReRAM Prepared...

MRS Proceedings 2010 / 1 Vol. 1250

Electrical Properties of TaOx Thin Films for ReRAM Prepared by Reactive RF Magnetron Sputtering Method

Fukuda, Natsuki, Kurihara, Hidenao, Horita, Kazumasa, Yoshida, Yoshiaki, Kokaze, Yutaka, Nishioka, Yutaka, Suu, Koukou
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
1250
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-1250-g12-12
Date:
January, 2010
File:
PDF, 205 KB
english, 2010
Conversion to is in progress
Conversion to is failed