Coarse-Grained Molecular Dynamics Simulation of Epoxy-Based Chemically-Amplified Resist for MEMS Application
Yagyu, Hiromasa, Hirai, Yoshikazu, Uesugi, Akio, Makino, Yoshihide, Sugano, Koji, Tsuchiya, Toshiyuki, Tabata, OsamuVolume:
1415
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/opl.2012.198
Date:
January, 2012
File:
PDF, 1.17 MB
english, 2012