Metal layer mask patterning by force microscopy lithography

Materials Science and Engineering: B 2004 Vol. 112; Iss. 2-3

Metal layer mask patterning by force microscopy lithography

H.D. Fonseca Filho, M.H.P. Maurício, C.R. Ponciano, R. Prioli
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Volume:
112
Year:
2004
Language:
english
Pages:
6
DOI:
10.1016/j.mseb.2004.05.031
File:
PDF, 197 KB
english, 2004
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