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Fabrication of GaN-based nanorod light emitting diodes using self-assemble nickel nano-mask and inductively coupled plasma reactive ion etching
Hung-Wen Huang, Chih-Chiang Kao, Tao-Hung Hsueh, Chang-Chin Yu, Chia-Feng Lin, Jung-Tang Chu, Hao-Chung Kuo, Shing-Chung WangVolume:
113
Year:
2004
Language:
english
Pages:
5
DOI:
10.1016/j.mseb.2004.07.004
File:
PDF, 190 KB
english, 2004