Boron-enhanced diffusion in excimer laser annealed Si
E.V. Monakhov, B.G. Svensson, M.K. Linnarsson, A. La Magna, V. Privitera, G. Fortunato, L. MariucciVolume:
114-115
Year:
2004
Language:
english
Pages:
4
DOI:
10.1016/j.mseb.2004.07.015
File:
PDF, 103 KB
english, 2004