Nickel silicides in semiconductor processing: thermal...

Materials Science and Engineering: B 2004 Vol. 114-115; Iss. none

Nickel silicides in semiconductor processing: thermal budget considerations

Sundar Ramamurthy, Balasubramanian Ramachandran, Jeong Soo Byun, Tarpan Dixit, Aaron Hunter, Rajesh Ramanujam
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Volume:
114-115
Year:
2004
Language:
english
Pages:
5
DOI:
10.1016/j.mseb.2004.07.076
File:
PDF, 350 KB
english, 2004
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