Improved Electrical Characteristics of Fully Depleted Ultrathin SOI MOSFETs Annealed in High-Pressure Hydrogen Ambient
Son, Yunik, Chang, Man, Park, Hokyung, Rahman, Md. Shahriar, Baek, Sungkwon, Hwang, HyunsangVolume:
10
Year:
2007
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.2773963
File:
PDF, 280 KB
english, 2007