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Characteristics of dielectric layers formed by low-temperature vacuum ultraviolet-assisted oxidation of SiGe layers
Craciun, Valentin, Boyd, Ian W., Perriere, Jacques, Hutton, Bernie, Nicholls, Edward J.Volume:
14
Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/JMR.1999.0477
Date:
September, 1999
File:
PDF, 174 KB
english, 1999