Chemical-vapour-deposition growth and electrical characterization of intrinsic silicon nanowires
B. Salem, F. Dhalluin, T. Baron, H. Jamgotchian, F. Bedu, H. Dallaporta, P. Gentile, N. Pauc, M.I. den Hertog, J.L. Rouviere, P. FerretVolume:
159-160
Year:
2009
Language:
english
Pages:
4
DOI:
10.1016/j.mseb.2008.09.011
File:
PDF, 586 KB
english, 2009