Patterned nanoporous poly(methylsilsesquioxane) thin films:...

Materials Science and Engineering: C 2004 Vol. 24; Iss. 4

Patterned nanoporous poly(methylsilsesquioxane) thin films: a potential high density substrate

Zach L Hogan, Cortney R Kreller, Kiet A Tran, Mark W Hart, Gregory M Wallraff, Sally A Swanson, Willi Volksen, Victor Y Lee, Teddie P Magbitang, James L Hedrick, Craig J Hawker, Robert D Miller, Ho-Ch
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Volume:
24
Year:
2004
Language:
english
Pages:
4
DOI:
10.1016/j.msec.2003.10.002
File:
PDF, 245 KB
english, 2004
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