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Characterization of Low-Temperature Silicon Nitride LPCVD from Bis(tertiary-butylamino)silane and Ammonia
Gumpher, John, Bather, Wayne, Mehta, Narendra, Wedel, DarinVolume:
151
Year:
2004
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1690294
File:
PDF, 249 KB
english, 2004