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Gate-recessed delta-doping enhancement-mode Al0.2Ga0.8As/In0.15Ga0.85As PHEMTs using a new citric buffer etchant
K.F. Yarn, C.I. Liao, Y.H. Wang, M.P. Houng, M.C. ChureVolume:
8
Year:
2005
Language:
english
Pages:
5
DOI:
10.1016/j.mssp.2005.02.001
File:
PDF, 384 KB
english, 2005