Misfit dislocation dipoles in Si/SiGe/Si heterostructures...

Materials Science in Semiconductor Processing 2006 Vol. 9; Iss. 1-3

Misfit dislocation dipoles in Si/SiGe/Si heterostructures on SOI

Tongda Ma, Hailing Tu, Beiling Shao, Ansheng Liu, Guangyong Hu
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Volume:
9
Year:
2006
Language:
english
Pages:
4
DOI:
10.1016/j.mssp.2006.01.006
File:
PDF, 243 KB
english, 2006
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