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Analysis of electrically active N–O complexes in nitrogen-doped CZ silicon crystals by FTIR spectroscopy
H. Ch. Alt, Y.V. Gomeniuk, F. Bittersberger, A. Kempf, D. ZemkeVolume:
9
Year:
2006
Language:
english
Pages:
3
DOI:
10.1016/j.mssp.2006.01.035
File:
PDF, 125 KB
english, 2006