Non-contact charge-voltage method for dielectric...

Materials Science in Semiconductor Processing 2006 Vol. 9; Iss. 1-3

Non-contact charge-voltage method for dielectric characterization on small test areas of IC product wafers

Piotr Edelman, Dmitriy Marinskiy, Carlos Almeida, Joseph N. Kochey, Anton Byelyayev, Marshall Wilson, Alexandre Savtchouk, John D’Amico, Andrew Findlay, Lubek Jastrzebski, Jacek Lagowski
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Volume:
9
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.mssp.2006.01.042
File:
PDF, 258 KB
english, 2006
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