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Non-contact charge-voltage method for dielectric characterization on small test areas of IC product wafers
Piotr Edelman, Dmitriy Marinskiy, Carlos Almeida, Joseph N. Kochey, Anton Byelyayev, Marshall Wilson, Alexandre Savtchouk, John D’Amico, Andrew Findlay, Lubek Jastrzebski, Jacek LagowskiVolume:
9
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.mssp.2006.01.042
File:
PDF, 258 KB
english, 2006