Study the effects of nitrogen annealing on oxygen...

Materials Science in Semiconductor Processing 2006 Vol. 9; Iss. 1-3

Study the effects of nitrogen annealing on oxygen precipitation in fast neutron-irradiated Czochralski silicon

Liu Lili, Chen Guifeng, Li Yangxian, Qiaoyun Ma, Sun Yong, Yang Shuai, Zhao Shuwen
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Volume:
9
Year:
2006
Language:
english
Pages:
3
DOI:
10.1016/j.mssp.2006.01.073
File:
PDF, 132 KB
english, 2006
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