Structural and Electrical Characterization of FeSix –...

MRS Proceedings 1995 / 1 Vol. 387

Structural and Electrical Characterization of FeSix – Layers (1≤ X ≤2) Prepared by RTP of Fe Layers Sputtered on Si (100)

Líbezný, M., Poortmans, J., Amesz, P. H., Donaton, R. A., Larsen, K. Kyllesbech, Vandenabeele, P., Jonckx, F., Maex, K., Nijs, J.

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Volume:

387

Language:

english

Journal:

MRS Proceedings

DOI:

10.1557/proc-387-389

Date:

January, 1995

File:

PDF, 1.07 MB

english, 1995

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