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[ECS 208th ECS Meeting - Los Angeles, California (October 16-October 21, 2005)] ECS Transactions - Quality Improvement and Electrical Characteristics of High-k Films after Receiving Direct Superimposed with Alternative Current Anodic Oxidation Compensation
Hwu, Jenn-Gwo, Chang, Chia-Hua, Wang, Tsung-MiauVolume:
1
Year:
2006
Language:
english
DOI:
10.1149/1.2209297
File:
PDF, 374 KB
english, 2006