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FABRICATION OF ULTRAHIGH-DENSITY NANO-PYRAMID ARRAYS (NPAs) ON (100) SILICON WAFER USING SCANNING PROBE LITHOGRAPHY AND ANISOTROPIC WET ETCHING
SHEU, JENG T., CHEN, CHENG C., YEH, SUN P., CHOU, HSEIH T.Volume:
4
Language:
english
Journal:
International Journal of Computational Engineering Science
DOI:
10.1142/S1465876303002076
Date:
September, 2003
File:
PDF, 322 KB
english, 2003