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[ECS 213th ECS Meeting - Phoenix, AZ (May 18 - May 23, 2008)] ECS Transactions - Pattern Dependence of Epitaxial-Realignment in Direct Silicon Bonded (DSB) Substrates with Hybrid Crystal Orientation
Itokawa, Hiroshi, Nomachi, Akiko, Yasutake, Nobuaki, Ishida, Tatsuya, Fukushima, Takashi, Harakawa, Hideaki, Kawase, Yoshimasa, Azuma, Atsushi, Mizushima, IchiroVolume:
13
Year:
2008
Language:
english
DOI:
10.1149/1.2911513
File:
PDF, 1.05 MB
english, 2008