Investigation of Nickelocene Decomposition during Chemical...

Investigation of Nickelocene Decomposition during Chemical Vapor Deposition of Nickel

Brissonneau, Laurent, Sahnoun, Riadh, Mijoule, Claude, Vahlas, Constantin
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Volume:
147
Year:
2000
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1393375
File:
PDF, 247 KB
english, 2000
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