Investigation of Nickelocene Decomposition during Chemical Vapor Deposition of Nickel
Brissonneau, Laurent, Sahnoun, Riadh, Mijoule, Claude, Vahlas, ConstantinVolume:
147
Year:
2000
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1393375
File:
PDF, 247 KB
english, 2000