Modeling of a Plasma Etcher for Charging Free Processing of...

Materials Science Forum 2006 Vol. 518

Modeling of a Plasma Etcher for Charging Free Processing of Nanoscale Structures

Radmilović-Radjenović, M., Nina, Aleksandra, Strinić, A., Stojanović, V., Nikitović, Željka, Malović, G.N., Petrović, Z.Lj.
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Volume:
518
Year:
2006
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.518.57
File:
PDF, 279 KB
english, 2006
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