Performance of Thin Film Silicon MEMS on Flexible Plastic Substrates
Patil, Samadhan, Chu, Virginia, Conde, Joao PedroVolume:
989
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-0989-A10-02
Date:
January, 2007
File:
PDF, 4.58 MB
english, 2007