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Metal Wafer Bonding for MEMS Applications
Dragoi, Viorel, Mittendorfer, Gerald, Murauer, Franz, Cakmak, Erkan, Pabo, EricVolume:
1139
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1139-GG03-33
Date:
January, 2008
File:
PDF, 147 KB
english, 2008