![](/img/cover-not-exists.png)
ECS Transactions [ECS 218th ECS Meeting - Las Vegas, NV (October 10 - October 15, 2010)] - The Influence of Ions and Photons during Plasma-Assisted ALD of Metal Oxides
Profijt, Harald B., Kudlacek, Pavel, Van de Sanden, M. C. M., Kessels, W. M. M.Year:
2010
Language:
english
DOI:
10.1149/1.3485242
File:
PDF, 293 KB
english, 2010