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ECS Transactions [ECS 220th ECS Meeting - Boston, MA (October 9 - October 14, 2011)] - Integrated Experimental and Numerical Study of Thermomechanical Resist Removal-Cleaning Performance Using Cryogenic Micro-Solid Nitrogen Spray
Ishimoto, Jun, Tan, Daisuke, Oh, U, Kubota, Tomohiro, Samukawa, SeijiYear:
2011
Language:
english
DOI:
10.1149/1.3630830
File:
PDF, 3.46 MB
english, 2011