Design and fabrication process of silicon...

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment 2008 Vol. 594; Iss. 2

Design and fabrication process of silicon micro-calorimeters on simple SOI technology for X-ray spectral imaging

A. Aliane, P. Agnese, C. Pigot, J.-L. Sauvageot, F. de Moro, H. Ribot, A. Gasse, V. Szeflinski, Y. Gobil
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Volume:
594
Year:
2008
Language:
english
Pages:
5
DOI:
10.1016/j.nima.2008.06.029
File:
PDF, 490 KB
english, 2008
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