Investigation of sputtering of thin diamond-like carbon...

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment 2010 Vol. 613; Iss. 3

Investigation of sputtering of thin diamond-like carbon (DLC) target foils by low energy light ions

Vitaly Liechtenstein, Vinder Jaggi, Eugene Olshanski, Jürgen A. Scheer, Peter Wurz, Stefan K. Zeisler
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Volume:
613
Year:
2010
Language:
english
Pages:
5
DOI:
10.1016/j.nima.2009.09.093
File:
PDF, 466 KB
english, 2010
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