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[ECS 215th ECS Meeting - San Francisco, CA (May 24 - May 29, 2009)] ECS Transactions - Production of High Aspect Ratio Single Holes in Semiconductors
Gerngroß, Mark-Daniel, Föll, Helmut, Cojocaru, Ala, Carstensen, JürgenYear:
2009
Language:
english
DOI:
10.1149/1.3120714
File:
PDF, 1.19 MB
english, 2009